All-solid-condition ultraviolet lasers are already commonly Utilized in the fields of mechanical flaw detection, lithography, micromachining and medication for some great benefits of smaller volume, long life, large effectiveness, great beam good quality, huge tuning and narrow spectral line, and so on. Utilizing high power around-infrared coherent gentle supply as the fundamental frequency resource based upon nonlinear tuning technology, making ultraviolet coherent radiation by multistage frequency conversion is considered to be a crucial method to produce the ultraviolet coherent gentle resource.
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For instance, The existing concave OC could be replaced by a plane mirror which could mitigate the facility density about the area of M1 plus the diamond. Additionally, utilizing higher damage threshold coatings for M1 and diamond would also Enhance the output electrical power with none damages. Then, the NIR laser on the 2nd Stokes wavelength could be significant sufficient, together with its great beam high quality, to generate the final DUV laser at 193 nm which has a substantial typical electric power.
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The two the 1040 nm and 1078 nm laser come from one particular dual-wavelength Yb-doped fiber laser. Every single laser is amplified by phases of fiber amplifier and Yb-doped supplies amplifier, respectively.
On the opposite side, the facility scaling on the NIR laser is another component to raise the typical ability in the 193-nm DUV laser. Because of the not enough the large-ability amplification Resolution of the NIR laser (one example is at 1553 nm), nonlinear frequency processes for instance optical parameter oscillation (OPO) might be placed on build a wavelength converter by shifting the wavelength from 1 μm to the specified wavelength in addition to acquiring relative higher electrical power [21]. Just lately, a diamond Raman laser confirmed its ability in acquiring a large ability and a high conversion efficiency with the 1st Stokes with the one-μm laser [22,23], which suggests the likelihood to generally be applied from the 193-nm DUV laser generation as a result of its significant Raman gain and enormous frequency change.
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The beam profile shown in Figure 7b shown click here a great beam top quality as one of several merits of Raman laser, which would be advantageous to crank out a 193-nm DUV laser with a top quality beam.
The conversion performance from essential NIR to DUV is from 5% to 36% according to the documented ends in Desk 1. Escalating the conversion performance will lessen the stress on the look and set up of the elemental laser amplifier as well as the electric energy consumption. A fantastic beam good quality of the fundamental laser will also contribute to the growing from the conversion efficiency in addition to the appropriate power depth of your NIR and environmentally friendly laser during the SHG and FHG system, respectively. The best conversion efficiencies from NIR to inexperienced and eco-friendly to DUV laser by use of CLBO crystal are 70% and about fifty%, respectively [twelve], which corresponds on the conversion effectiveness of 35% from basic to DUV.
The event in the 193-nm laser was shown by phases of SFG. In order to scale the DUV laser ability efficiently, a new strategy from the 193-nm DUV laser technology is presented determined by the diamond Raman laser.